Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8475672 | Plasma processing device, plasma processing method and method of manufacturing element including substrate to be processed | Yukito Nakagawa | 2013-07-02 |
| 8231767 | Magnetic field generating apparatus and plasma processing apparatus | Masayoshi Ikeda, Yasumi Sago | 2012-07-31 |