Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE42175 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa +1 more | 2011-03-01 |
| 7220319 | Electrostatic chucking stage and substrate processing apparatus | Yasumi Sago, Kazuaki Kaneko, Takuji Okada, Masayoshi Ikeda, Toshihiro Tachikawa +1 more | 2007-05-22 |
| 6535371 | Layered ceramic/metallic assembly, and an electrostatic chuck using such an assembly | Takashi Kayamoto, Toshihiko Hanamachi, Ryusuke Adachi | 2003-03-18 |