Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Tomonori Kojimaru, Tomomasa ISHIDA, Ayumi HIGUCHI, Naozumi Fujiwara +2 more | 2020-05-12 |
| 9142433 | Substrate processing apparatus and substrate processing method | Masahiro Miyagi | 2015-09-22 |
| 5704493 | Substrate holder | Kenji Yasui, Hisao Nishizawa | 1998-01-06 |
| 5331987 | Apparatus and method for rinsing and drying substrate | Eiichiro Hayashi | 1994-07-26 |
| 4970626 | Electrolytic capacitor and method of preparing it | Yoshiaki Kakinoki, Katsunori Matsuda, Ryoichi Shimatani, Nobuyoshi Kanzaki, Iwao Tajima | 1990-11-13 |