Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362167 | Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus | Masayuki OTSUJI, Yuta SASAKI | 2025-07-15 |
| 11851745 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Masayuki OTSUJI, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2023-12-26 |
| 11124869 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Masayuki OTSUJI, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2021-09-21 |
| 11033929 | Application method | — | 2021-06-15 |
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomonori Kojimaru, Tomomasa ISHIDA, Ayumi HIGUCHI +2 more | 2020-05-12 |
| 9873141 | Filler layer forming method | Naoko Yamaguchi | 2018-01-23 |
| 9805938 | Substrate processing apparatus and substrate processing method | Toru Edo, Yuji Sugahara, Seiji ANO, Jun SAWASHIMA | 2017-10-31 |
| 9460944 | Substrate treating apparatus and method of treating substrate | Toru Edo, Jun SAWASHIMA, Tatsumi Shimomura | 2016-10-04 |
| 9214331 | Substrate processing method and substrate processing apparatus | Katsuhiko Miya | 2015-12-15 |
| 8623146 | Substrate processing method and substrate processing apparatus | Masahiko Kato, Katsuhiko Miya | 2014-01-07 |
| 8029622 | Substrate processing apparatus, liquid film freezing method and substrate processing method | Katsuhiko Miya, Akira Izumi | 2011-10-04 |