Issued Patents All Time
Showing 1–25 of 34 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10619894 | Substrate processing apparatus and substrate processing method | Hiroaki Kitagawa, Dai Ueda | 2020-04-14 |
| 10612844 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Yosuke HANAWA | 2020-04-07 |
| 10586693 | Substrate processing apparatus and substrate processing method | Masahiko Kato, Hiroyuki Yashiki | 2020-03-10 |
| 10286425 | Substrate cleaning method and substrate cleaning apparatus | Yuta SASAKI, Yosuke HANAWA | 2019-05-14 |
| 10065218 | Substrate processing method and substrate processing apparatus | Hiroaki Kitagawa | 2018-09-04 |
| 9976804 | Vapor supplying apparatus, vapor drying apparatus, vapor supplying method, and vapor drying method | Yosuke HANAWA | 2018-05-22 |
| 9922848 | Apparatus for and method of processing substrate | Hiroaki Kitagawa | 2018-03-20 |
| 9859110 | Substrate cleaning method and substrate cleaning apparatus | Yosuke HANAWA, Yuta SASAKI | 2018-01-02 |
| 9728396 | Substrate cleaning method and substrate cleaning apparatus | Yosuke HANAWA, Yuta SASAKI | 2017-08-08 |
| 9431276 | Substrate processing apparatus and substrate processing method | Akira Izumi | 2016-08-30 |
| 9214331 | Substrate processing method and substrate processing apparatus | Naozumi Fujiwara | 2015-12-15 |
| 9111966 | Substrate processing apparatus and substrate processing method | Hiroaki Kitagawa | 2015-08-18 |
| 8857449 | Substrate processing apparatus and substrate processing method | — | 2014-10-14 |
| 8696825 | Substrate processing method | Akira Izumi | 2014-04-15 |
| 8623146 | Substrate processing method and substrate processing apparatus | Masahiko Kato, Naozumi Fujiwara | 2014-01-07 |
| 8109282 | Substrate processing apparatus and substrate processing method | Akira Izumi | 2012-02-07 |
| 8075731 | Substrate processing apparatus and a substrate processing method | — | 2011-12-13 |
| 8029622 | Substrate processing apparatus, liquid film freezing method and substrate processing method | Naozumi Fujiwara, Akira Izumi | 2011-10-04 |
| 8020570 | Substrate processing apparatus and substrate processing method | Takuya Kishimoto | 2011-09-20 |
| 7964042 | Substrate processing apparatus and substrate processing method | Tomonori Kojimaru | 2011-06-21 |
| 7942976 | Substrate processing apparatus and substrate processing method | Akira Izumi | 2011-05-17 |
| 7823597 | Substrate processing apparatus and substrate processing method | — | 2010-11-02 |
| 7811412 | Substrate processing apparatus and substrate processing method drying substrate | Akira Izumi | 2010-10-12 |
| 7767026 | Substrate processing apparatus and substrate processing method | — | 2010-08-03 |
| 7722736 | Apparatus for and method of processing a substrate with processing liquid | — | 2010-05-25 |