Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10639665 | Substrate processing apparatus and standby method for ejection head | Kota SOTOKU, Masanobu Sato | 2020-05-05 |
| 10586693 | Substrate processing apparatus and substrate processing method | Masahiko Kato, Katsuhiko Miya | 2020-03-10 |
| 9721814 | Substrate processing apparatus | Masanobu Sato | 2017-08-01 |
| 8888925 | Nozzle, substrate processing apparatus, and substrate processing method | Masanobu Sato, Mai YAMAKAWA, Takayoshi Tanaka, Ayumi HIGUCHI, Rei TAKEAKI | 2014-11-18 |
| 7935217 | Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate | Eiji Fukatsu | 2011-05-03 |
| 7547181 | Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum | Eiji Fukatsu, Hideki Adachi, Katsuhiko Miya | 2009-06-16 |