Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11380562 | Substrate processing apparatus | Koji Ando, Tadashi MAEGAWA, Yosuke YASUTAKE | 2022-07-05 |
| 10790151 | Substrate processing apparatus and substrate processing method | Masayuki Hayashi, Takashi Ota | 2020-09-29 |
| 10727091 | Substrate processing apparatus | Koji Ando, Tadashi MAEGAWA, Yosuke YASUTAKE | 2020-07-28 |
| 10699895 | Substrate processing method | Taiki HINODE, Sadamu Fujii | 2020-06-30 |
| 10685829 | Substrate processing method | Taiki HINODE, Sadamu Fujii | 2020-06-16 |
| 10593569 | Substrate processing method | Taiki HINODE, Sadamu Fujii | 2020-03-17 |
| 10438821 | Substrate processing apparatus | Koji Ando, Tadashi MAEGAWA, Yosuke YASUTAKE | 2019-10-08 |
| 9230836 | Substrate treatment method | Ayumi HIGUCHI, Yoshiyuki FUJITANI, Takemitsu MIURA | 2016-01-05 |
| 8888925 | Nozzle, substrate processing apparatus, and substrate processing method | Masanobu Sato, Hiroyuki Yashiki, Mai YAMAKAWA, Takayoshi Tanaka, Ayumi HIGUCHI | 2014-11-18 |