Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11094564 | Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method | Shota IWAHATA, Ayumi HIGUCHI, Eri Fujita, Masako Mano, Yusuke TAKEMATSU +1 more | 2021-08-17 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Eri Fujita, Shota IWAHATA, Masayuki OTSUJI | 2020-10-27 |
| 9230836 | Substrate treatment method | Ayumi HIGUCHI, Takemitsu MIURA, Rei TAKEAKI | 2016-01-05 |