Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260436 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA | 2022-03-01 |
| 11094564 | Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method | Shota IWAHATA, Ayumi HIGUCHI, Yoshiyuki FUJITANI, Masako Mano, Yusuke TAKEMATSU +1 more | 2021-08-17 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Shota IWAHATA, Masayuki OTSUJI, Yoshiyuki FUJITANI | 2020-10-27 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA | 2020-07-21 |
| 6512245 | Semiconductor integrated circuit device | Shuji Ikeda, Satoshi Meguro, Kyoichiro Asayama, Koichiro Ishibashi, Toshiro Aoto +8 more | 2003-01-28 |
| 6307217 | Semiconductor memory device having driver and load MISFETs and capacitor elements | Shuji Ikeda, Satoshi Meguro, Kyoichiro Asayama, Koichiro Ishibashi, Toshiro Aoto +8 more | 2001-10-23 |