Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260436 | Substrate processing apparatus and substrate processing method | Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA | 2022-03-01 |
| 10790169 | Substrate processing apparatus | Koji Hashimoto | 2020-09-29 |
| 10717117 | Substrate processing apparatus and substrate processing method | Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI, Shota IWAHATA | 2020-07-21 |
| 10395952 | Substrate processing apparatus and substrate processing method | Koji Hashimoto | 2019-08-27 |
| 9802227 | Method of cleaning substrate processing apparatus | Kentaro Sugimoto | 2017-10-31 |
| 9740648 | Substrate treatment apparatus that controls respective units by master-slave method | Takuya Miyashita, Satoshi Segawa | 2017-08-22 |
| 9378988 | Substrate processing apparatus and substrate processing method using processing solution | Kentaro Sugimoto | 2016-06-28 |
| 9190300 | Method of cleaning substrate processing apparatus | Kentaro Sugimoto | 2015-11-17 |
| 9027577 | Nozzle and a substrate processing apparatus including the same | Masashi Sawamura, Koji Hasegawa | 2015-05-12 |
| 5962070 | Substrate treating method and apparatus | Tsuyoshi Mitsuhashi, Takuya Wada, Koji Hashimoto | 1999-10-05 |