Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11260436 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI | 2022-03-01 |
| 11094564 | Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method | Ayumi HIGUCHI, Eri Fujita, Yoshiyuki FUJITANI, Masako Mano, Yusuke TAKEMATSU +1 more | 2021-08-17 |
| 10886133 | Substrate processing method and substrate processing device | Daisuke Shimizu, Masayuki OTSUJI | 2021-01-05 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Eri Fujita, Masayuki OTSUJI, Yoshiyuki FUJITANI | 2020-10-27 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Ayumi HIGUCHI | 2020-07-21 |
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomonori Kojimaru, Tomomasa ISHIDA, Ayumi HIGUCHI +2 more | 2020-05-12 |
| 10615026 | Substrate processing method and substrate processing apparatus | Masayuki OTSUJI | 2020-04-07 |