Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362167 | Method for producing liquid containing sublimable substance, substrate drying method, and substrate processing apparatus | Naozumi Fujiwara, Yuta SASAKI | 2025-07-15 |
| 12159783 | Method of restoring collapsed pattern, substrate processing method, and substrate processing device | — | 2024-12-03 |
| 11851745 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Naozumi Fujiwara, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2023-12-26 |
| 11769663 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masahiko Kato, Yu YAMAGUCHI, Yuta SASAKI | 2023-09-26 |
| 11443960 | Substrate processing apparatus and substrate processing method | — | 2022-09-13 |
| 11417513 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masahiko Kato, Yu YAMAGUCHI, Yuta SASAKI | 2022-08-16 |
| 11373860 | Method of restoring collapsed pattern, substrate processing method, and substrate processing device | — | 2022-06-28 |
| 11328925 | Substrate drying method and substrate processing apparatus | Yuta SASAKI, Hiroaki Takahashi | 2022-05-10 |
| 11302525 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroaki Takahashi, Hiroshi Abe, Chikara MAEDA, Hitoshi Nakai +1 more | 2022-04-12 |
| 11201067 | Substrate treatment method and substrate treatment device | — | 2021-12-14 |
| 11154913 | Substrate treatment method and substrate treatment device | — | 2021-10-26 |
| 11124869 | Substrate processing method, substrate processing apparatus and pre-drying processing liquid | Yuta SASAKI, Naozumi Fujiwara, Masahiko Kato, Yu YAMAGUCHI, Hiroaki Takahashi | 2021-09-21 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Manabu OKUTANI, Chikara MAEDA, Hiroshi Abe +2 more | 2021-08-24 |
| 11094524 | Substrate processing method and substrate processing apparatus | — | 2021-08-17 |
| 11036139 | Sacrificial film forming method, substrate treatment method, and substrate treatment device | — | 2021-06-15 |
| 10935825 | Substrate processing method | — | 2021-03-02 |
| 10900127 | Substrate processing method and substrate processing apparatus | — | 2021-01-26 |
| 10886133 | Substrate processing method and substrate processing device | Daisuke Shimizu, Shota IWAHATA | 2021-01-05 |
| 10854477 | Substrate processing apparatus and substrate processing method | — | 2020-12-01 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Ayumi HIGUCHI, Eri Fujita, Shota IWAHATA, Yoshiyuki FUJITANI | 2020-10-27 |
| 10615026 | Substrate processing method and substrate processing apparatus | Shota IWAHATA | 2020-04-07 |
| 10549322 | Substrate processing apparatus and substrate processing method | — | 2020-02-04 |
| 9455134 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Tetsuya EMOTO, Manabu OKUTANI | 2016-09-27 |
| 9005703 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Tetsuya EMOTO, Manabu OKUTANI | 2015-04-14 |
| 8821974 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Tetsuya EMOTO, Manabu OKUTANI | 2014-09-02 |