Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255061 | Substrate processing method | Shigeru Yamamoto, Daiki Fujii, Kenji Edamitsu, Keiji Iwata, Yuya KAWAI +1 more | 2025-03-18 |
| 10910213 | Substrate processing apparatus and substrate processing method | Atsuro Eitoku, Tomomi Iwata | 2021-02-02 |
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Akira OATO, Yuta Nakano, Teppei Nakano, Takashi Akiyama +4 more | 2020-11-24 |
| 10790166 | Substrate processing method and substrate processing apparatus | — | 2020-09-29 |
| 10720320 | Substrate processing method and substrate processing device | Atsuro Eitoku, Tomomi Iwata, Akihiko TAKI | 2020-07-21 |
| 10510528 | Substrate processing method | — | 2019-12-17 |
| 10224198 | Substrate processing apparatus and substrate processing method | Atsuro Eitoku, Tomomi Iwata | 2019-03-05 |
| 9455134 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Manabu OKUTANI, Masayuki OTSUJI | 2016-09-27 |
| 9259758 | Substrate treatment method and substrate treatment apparatus | Manabu OKUTANI | 2016-02-16 |
| 9005703 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Manabu OKUTANI, Masayuki OTSUJI | 2015-04-14 |
| 8821974 | Substrate processing method | Masahiro Kimura, Tomonori Kojimaru, Manabu OKUTANI, Masayuki OTSUJI | 2014-09-02 |