Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11121008 | Method of processing substrate and substrate processing apparatus | Takayoshi Tanaka | 2021-09-14 |
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Tetsuya EMOTO, Yuta Nakano, Teppei Nakano, Takashi Akiyama +4 more | 2020-11-24 |