Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11195731 | Substrate processing device, substrate processing method, and substrate processing system | Masafumi Inoue, Hiroki Taniguchi, Takayoshi Tanaka, Yuta Nakano | 2021-12-07 |
| 11031235 | Substrate processing apparatus | Hiromichi KABA, Tomomi Iwata, Toru Edo, Kunio Yamada | 2021-06-08 |
| 10777404 | Substrate processing apparatus | Hiromichi KABA, Tomomi Iwata, Toru Edo, Kunio Yamada | 2020-09-15 |
| 10720320 | Substrate processing method and substrate processing device | Tetsuya EMOTO, Atsuro Eitoku, Tomomi Iwata | 2020-07-21 |
| 10199243 | Substrate processing method and substrate processing apparatus | Kazuhiro Fujita, Atsuyasu Miura, Hiroki Tsujikawa, Yuya Tsuchihashi | 2019-02-05 |
| 10192771 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Hiromichi KABA | 2019-01-29 |
| 9892955 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Hiromichi KABA | 2018-02-13 |