Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11031235 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Toru Edo, Kunio Yamada | 2021-06-08 |
| 10910213 | Substrate processing apparatus and substrate processing method | Tetsuya EMOTO, Atsuro Eitoku | 2021-02-02 |
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Tetsuya EMOTO, Akira OATO, Yuta Nakano, Teppei Nakano +4 more | 2020-11-24 |
| 10777404 | Substrate processing apparatus | Hiromichi KABA, Akihiko TAKI, Toru Edo, Kunio Yamada | 2020-09-15 |
| 10720320 | Substrate processing method and substrate processing device | Tetsuya EMOTO, Atsuro Eitoku, Akihiko TAKI | 2020-07-21 |
| 10224198 | Substrate processing apparatus and substrate processing method | Tetsuya EMOTO, Atsuro Eitoku | 2019-03-05 |
| 7562663 | High-pressure processing apparatus and high-pressure processing method | Yusuke Muraoka, Kimitsugu Saito, Masahiro Yamagata, Hisanori Oshiba, Shogo Sarumaru | 2009-07-21 |
| 7513265 | High pressure processing method and apparatus | Tetsuya Yoshikawa, Yoichi Inoue, Katsumi Watanabe, Kaoru Masuda, Katsuyuki Iijima +3 more | 2009-04-07 |
| 7435396 | High-pressure processing apparatus and high-pressure processing method | Yusuke Muraoka, Kimitsugu Saito, Masahiro Yamagata, Yoichi Inoue, Hisanori Oshiba | 2008-10-14 |
| 7384484 | Substrate processing method, substrate processing apparatus and substrate processing system | Yusuke Muraoka, Kimitsugu Saito, Eiji Fukatsu, Ikuo Mizobata, Hiroyuki Ueno +7 more | 2008-06-10 |
| 6897623 | Electric power supply system for LED lighting unit | Kenji Yoneda, Masahiro Wakata | 2005-05-24 |
| 6841031 | Substrate processing apparatus equipping with high-pressure processing unit | Yusuke Muraoka, Kimitsugu Saito, Ikuo Mizobata, Takashi Miyake, Ryuji Kitakado | 2005-01-11 |
| 6703316 | Method and system for processing substrate | Yoichi Inoue, Yoshihiko Sakashita, Katsumi Watanabe, Nobuyuki Kawakami, Takahiko Ishii +5 more | 2004-03-09 |
| 6691430 | High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus | Kimitsugu Saito, Yusuke Muraoka, Ryuji Kitakado, Takashi Miyake, Ikuo Mizobata | 2004-02-17 |