Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12183599 | Substrate treatment device and substrate treatment method | Masafumi Inoue | 2024-12-31 |
| 11961744 | Substrate processing apparatus and substrate processing method | Koji Hashimoto, Hiroyuki Fujiki, Masafumi Inoue | 2024-04-16 |
| 7935217 | Substrate processing apparatus for treating substrate with predetermined processing by supplying processing liquid to rim portion of rotating substrate | Hiroyuki Yashiki | 2011-05-03 |
| 7547181 | Substrate position correcting method and apparatus using either substrate radius or center of rotation correction adjustment sum | Hiroyuki Yashiki, Hideki Adachi, Katsuhiko Miya | 2009-06-16 |
| 7503978 | Substrate processing apparatus and substrate processing method which performs predetermined processing on a substrate which is positioned approximately horizontally at a substrate processing position | Katsuhiko Miya | 2009-03-17 |
| 7384484 | Substrate processing method, substrate processing apparatus and substrate processing system | Yusuke Muraoka, Kimitsugu Saito, Tomomi Iwata, Ikuo Mizobata, Hiroyuki Ueno +7 more | 2008-06-10 |
| 7246984 | Method and apparatus for transferring an article to be processed and processing apparatus | Shogo Sarumaru, Hideshi Yamane, Katsumi Watanabe, Hiroyuki Ueno, Hideki Adachi | 2007-07-24 |