Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7513265 | High pressure processing method and apparatus | Tetsuya Yoshikawa, Yoichi Inoue, Katsumi Watanabe, Kaoru Masuda, Katsuyuki Iijima +3 more | 2009-04-07 |
| 7384484 | Substrate processing method, substrate processing apparatus and substrate processing system | Yusuke Muraoka, Kimitsugu Saito, Tomomi Iwata, Eiji Fukatsu, Hiroyuki Ueno +7 more | 2008-06-10 |
| 7252719 | High pressure processing method | Yoshihiko Sakashita, Katsumi Watanabe, Hisanori Oshiba, Shogo Sarumaru, Yusuke Muraoka +2 more | 2007-08-07 |
| 7111630 | High pressure processing apparatus and method | Yusuke Muraoka, Kimitsugu Saito, Ryuji Kitakado, Yoichi Inoue, Yoshihiko Sakashita +3 more | 2006-09-26 |
| 7080651 | High pressure processing apparatus and method | Yusuke Muraoka, Kimitsugu Saito, Ryuji Kitakado, Yoichi Inoue, Yoshihiko Sakashita +3 more | 2006-07-25 |
| 7000653 | High pressure processing apparatus and high pressure processing method | Yoshihiko Sakashita, Katsumi Watanabe, Hisanori Oshiba, Shogo Sarumaru, Yusuke Muraoka +2 more | 2006-02-21 |
| 6874513 | High pressure processing apparatus | Masahiro Yamagata, Hisanori Oshiba, Yoshihiko Sakashita, Yoichi Inoue, Yusuke Muraoka +2 more | 2005-04-05 |
| 6841031 | Substrate processing apparatus equipping with high-pressure processing unit | Tomomi Iwata, Yusuke Muraoka, Kimitsugu Saito, Takashi Miyake, Ryuji Kitakado | 2005-01-11 |
| 6823880 | High pressure processing apparatus and high pressure processing method | Yoshihiko Sakashita, Katsumi Watanabe, Masahiro Yamagata, Hisanori Oshiba, Shogo Sarumaru +3 more | 2004-11-30 |
| 6703316 | Method and system for processing substrate | Yoichi Inoue, Yoshihiko Sakashita, Katsumi Watanabe, Nobuyuki Kawakami, Takahiko Ishii +5 more | 2004-03-09 |
| 6691430 | High-pressure drying apparatus, high-pressure drying method and substrate processing apparatus | Kimitsugu Saito, Yusuke Muraoka, Ryuji Kitakado, Takashi Miyake, Tomomi Iwata | 2004-02-17 |
| 5865893 | Spin coating apparatus | Minobu Matsunaga, Masahiro Mimasaka | 1999-02-02 |