Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6089762 | Developing apparatus, developing method and substrate processing apparatus | Koji Uchitani | 2000-07-18 |
| 6076979 | Method of and apparatus for supplying developing solution onto substrate | Akiko Tanaka, Yukihiro Takamura | 2000-06-20 |
| 5989632 | Coating solution applying method and apparatus | Masakazu Sanada | 1999-11-23 |
| 5984540 | Developing apparatus and developing method | Minobu Matsunaga, Akiko Tanaka, Koji Uchitani | 1999-11-16 |
| 5865893 | Spin coating apparatus | Minobu Matsunaga, Ikuo Mizobata | 1999-02-02 |
| 5020200 | Apparatus for treating a wafer surface | Hiroyuki Hirai | 1991-06-04 |
| 4998021 | Method of detecting an end point of surface treatment | — | 1991-03-05 |