Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10910213 | Substrate processing apparatus and substrate processing method | Tetsuya EMOTO, Tomomi Iwata | 2021-02-02 |
| 10843223 | Substrate processing method and substrate processing apparatus | Takayoshi Tanaka, Tetsuya EMOTO, Akira OATO, Yuta Nakano, Teppei Nakano +4 more | 2020-11-24 |
| 10720320 | Substrate processing method and substrate processing device | Tetsuya EMOTO, Tomomi Iwata, Akihiko TAKI | 2020-07-21 |
| 10224198 | Substrate processing apparatus and substrate processing method | Tetsuya EMOTO, Tomomi Iwata | 2019-03-05 |
| 8118945 | Substrate processing method and substrate processing apparatus | — | 2012-02-21 |
| 7494549 | Substrate treatment apparatus and substrate treatment method | — | 2009-02-24 |
| 6273104 | Method of and apparatus for processing substrate | Kaoru Shinbara, Katsuyuki Miyake | 2001-08-14 |
| 5943726 | Substrate processing apparatus | Takao Kunihiro | 1999-08-31 |