Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6273104 | Method of and apparatus for processing substrate | Atsuro Eitoku, Katsuyuki Miyake | 2001-08-14 |
| 6155275 | Substrate processing unit and substrate processing apparatus using the same | — | 2000-12-05 |
| 5485644 | Substrate treating apparatus | Yasuhiro Kurata, Masashi Sawamura | 1996-01-23 |
| 5288333 | Wafer cleaning method and apparatus therefore | Masato Tanaka, Hisao Nishizawa, Nobuyuki Hirai, Hitoshi Yoshioka | 1994-02-22 |
| 5158100 | Wafer cleaning method and apparatus therefor | Masato Tanaka, Hisao Nishizawa, Nobuyuki Hirai, Hitoshi Yoshioka | 1992-10-27 |
| 4788994 | Wafer holding mechanism | — | 1988-12-06 |