Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5888344 | Method of and an apparatus for processing a substrate | Nobutoshi Ogami | 1999-03-30 |
| 5704493 | Substrate holder | Kazunori Fujikawa, Kenji Yasui | 1998-01-06 |
| 5288333 | Wafer cleaning method and apparatus therefore | Masato Tanaka, Nobuyuki Hirai, Kaoru Shinbara, Hitoshi Yoshioka | 1994-02-22 |
| 5275184 | Apparatus and system for treating surface of a wafer by dipping the same in a treatment solution and a gate device for chemical agent used in the apparatus and the system | Yoshio Nomura, Hiroyuki Araki | 1994-01-04 |
| 5158100 | Wafer cleaning method and apparatus therefor | Masato Tanaka, Nobuyuki Hirai, Kaoru Shinbara, Hitoshi Yoshioka | 1992-10-27 |
| 4871417 | Method and apparatus for surface treating of substrates | Masaru Morita, Masato Tanaka | 1989-10-03 |
| 4811443 | Apparatus for washing opposite surfaces of a substrate | — | 1989-03-14 |
| 4735000 | Apparatus for drying substrates | Noriyuki Hayashi, Eiichiro Hayashi | 1988-04-05 |
| 4569717 | Method of surface treatment | Nobutoshi Ohgami, Masaru Kitagawa, Masakazu Saita | 1986-02-11 |