Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12083563 | Substrate treating apparatus | Kazuhiko Nakazawa, Yuichi TAKAYAMA, Toshihito MORIOKA, Takuya Sato | 2024-09-10 |
| 11948823 | Substrate treating apparatus | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Toshihito MORIOKA, Takuya Sato | 2024-04-02 |
| 11850623 | Substrate treating apparatus and substrate transporting method | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Toshihito MORIOKA, Takuya Sato, Noriyuki KIKUMOTO | 2023-12-26 |
| 11764055 | Substrate processing method and substrate processing device | Nobuyuki Shibayama, Toru Edo | 2023-09-19 |
| 11521881 | Substrate treating apparatus | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Toshihito MORIOKA, Takuya Sato | 2022-12-06 |
| 11031235 | Substrate processing apparatus | Akihiko TAKI, Tomomi Iwata, Toru Edo, Kunio Yamada | 2021-06-08 |
| 10777404 | Substrate processing apparatus | Akihiko TAKI, Tomomi Iwata, Toru Edo, Kunio Yamada | 2020-09-15 |
| 10192771 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Akihiko TAKI | 2019-01-29 |
| 9892955 | Substrate holding/rotating device, substrate processing apparatus including the same, and substrate processing method | Akihiko TAKI | 2018-02-13 |