Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12083563 | Substrate treating apparatus | Kazuhiko Nakazawa, Yuichi TAKAYAMA, Hiromichi KABA, Takuya Sato | 2024-09-10 |
| 11948823 | Substrate treating apparatus | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Hiromichi KABA, Takuya Sato | 2024-04-02 |
| 11850623 | Substrate treating apparatus and substrate transporting method | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Hiromichi KABA, Takuya Sato, Noriyuki KIKUMOTO | 2023-12-26 |
| 11521881 | Substrate treating apparatus | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Hiromichi KABA, Takuya Sato | 2022-12-06 |
| 10471479 | Treatment device and exhaust switching device therefor, and exhaust switching unit and switching valve box | Hideaki Higuchi, Toshiaki Iwabuchi, Tsutomu Kojima | 2019-11-12 |
| 10141206 | Substrate processing apparatus and gap washing method | — | 2018-11-27 |