Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12424479 | Substrate reversing method with reversing mechanism | — | 2025-09-23 |
| 12083563 | Substrate treating apparatus | Kazuhiko Nakazawa, Toshihito MORIOKA, Hiromichi KABA, Takuya Sato | 2024-09-10 |
| 11967518 | Substrate treating apparatus and substrate reversing method | — | 2024-04-23 |
| 11948823 | Substrate treating apparatus | Kazuhiko Nakazawa, Hiromichi KABA, Toshihito MORIOKA, Takuya Sato | 2024-04-02 |
| 11850623 | Substrate treating apparatus and substrate transporting method | Kazuhiko Nakazawa, Hiromichi KABA, Toshihito MORIOKA, Takuya Sato, Noriyuki KIKUMOTO | 2023-12-26 |
| 11521881 | Substrate treating apparatus | Kazuhiko Nakazawa, Hiromichi KABA, Toshihito MORIOKA, Takuya Sato | 2022-12-06 |
| 11081376 | Substrate processing apparatus, transfer module, and coupling module | Koji Hashimoto, Noriyuki KIKUMOTO | 2021-08-03 |