Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11850623 | Substrate treating apparatus and substrate transporting method | Yuichi TAKAYAMA, Kazuhiko Nakazawa, Hiromichi KABA, Toshihito MORIOKA, Takuya Sato | 2023-12-26 |
| 11823921 | Substrate processing device and substrate processing method | Michinori IWAO, Shuichi Yasuda, Kazuhiro Fujita, Takahiro Yamaguchi | 2023-11-21 |
| 11823929 | Substrate treating apparatus | Yuzo Uchida, Hiroyuki Kawahara | 2023-11-21 |
| 11594436 | Substrate treating apparatus | Yuzo Uchida, Hiroyuki Kawahara | 2023-02-28 |
| 11581208 | Substrate treating apparatus | Yuzo Uchida, Hiroyuki Kawahara | 2023-02-14 |
| 11410865 | Substrate processing apparatus | Hiroyuki Kawahara, Koji Hashimoto, Noritake SUMI | 2022-08-09 |
| 11342201 | Substrate processing apparatus | Tetsuo Ito, Kazuki Inoue, Kunio Yamada | 2022-05-24 |
| 11315820 | Substrate processing device and substrate processing method | Tetsuo Ito, Kazuki Inoue, Kunio Yamada | 2022-04-26 |
| 11081376 | Substrate processing apparatus, transfer module, and coupling module | Yuichi TAKAYAMA, Koji Hashimoto | 2021-08-03 |
| 10933448 | Substrate treatment apparatus and substrate treatment method | Shuichi Yasuda, Michinori IWAO, Mitsutoshi SASAKI | 2021-03-02 |
| 10921057 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Naohiko YOSHIHARA, Hiroshi Abe | 2021-02-16 |
| 10861717 | Substrate processing apparatus, processing liquid draining method, processing liquid replacing method, and substrate processing method | Michinori IWAO, Shuichi Yasuda | 2020-12-08 |
| 10760852 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Naohiko YOSHIHARA, Hiroshi Abe | 2020-09-01 |
| 10741422 | Substrate processing device and substrate processing method | Michinori IWAO, Shuichi Yasuda, Kazuhiro Fujita, Mizuki Osawa, Hiroshi EBISUI | 2020-08-11 |
| 10727090 | Substrate processing apparatus and substrate processing method | Toyohide Hayashi, Naoto Fujita, Michinori IWAO, Wataru Sakai | 2020-07-28 |
| 10636682 | Substrate processing apparatus | Masahiro Kimura, Shuichi Yasuda, Kazuhiro Fujita | 2020-04-28 |
| 10573523 | Substrate processing device which performs processing on substrate | — | 2020-02-25 |
| 10553422 | Substrate treatment method of treating substrate, and substrate treatment apparatus | Shuichi Yasuda, Kazuhiro Fujita, Michinori IWAO | 2020-02-04 |
| 10229846 | Substrate processing apparatus | — | 2019-03-12 |
| 10115623 | Substrate processing apparatus | Kazuhiro Honsho | 2018-10-30 |
| 9947572 | Substrate processing apparatus | Kazuhiro Honsho | 2018-04-17 |