Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12128451 | Substrate processing system and substrate processing method | Hiroaki Ishii, Junichi Ishii | 2024-10-29 |
| 12080566 | Substrate treating apparatus and substrate treating method | Taiki HINODE, Takashi Ota, Mitsukazu Takahashi, Yusuke Akizuki | 2024-09-03 |
| 10910247 | Substrate container, load port apparatus, and substrate treating apparatus | Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto | 2021-02-02 |
| 10381249 | Substrate container, load port apparatus, and substrate treating apparatus | Mitsukazu Takahashi, Akito Hatano, Koji Hashimoto | 2019-08-13 |
| 10115623 | Substrate processing apparatus | Noriyuki KIKUMOTO | 2018-10-30 |
| 9947572 | Substrate processing apparatus | Noriyuki KIKUMOTO | 2018-04-17 |
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Akito Hatano, Koji Hashimoto, Mitsukazu Takahashi | 2017-02-21 |