Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610790 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2023-03-21 |
| 11410863 | Substrate processing device including heater between substrate and spin base | Motoyuki Shimai, Toyohide Hayashi | 2022-08-09 |
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2021-07-27 |
| 10910247 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Mitsukazu Takahashi, Koji Hashimoto | 2021-02-02 |
| 10748795 | Substrate processing method and substrate processing apparatus | Kota SOTOKU, Toyohide Hayashi, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |
| 10403517 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akihiro Nakashima, Motoyuki Shimai | 2019-09-03 |
| 10381249 | Substrate container, load port apparatus, and substrate treating apparatus | Kazuhiro Honsho, Mitsukazu Takahashi, Koji Hashimoto | 2019-08-13 |
| 10332761 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2019-06-25 |
| 10297476 | Substrate processing apparatus | Jun SAWASHIMA, Kenji Kobayashi, Yuta Nishimura, Motoyuki Shimai, Toyohide Hayashi | 2019-05-21 |
| 10115588 | Substrate treating apparatus and substrate treating method | Koji Hashimoto | 2018-10-30 |
| 9810532 | Substrate treating apparatus and substrate treating methods | Koji Hashimoto, Toyohide Hayashi, Keiichi Tsuchiya | 2017-11-07 |
| 9576831 | Substrate container, a load port apparatus, and a substrate treating apparatus | Koji Hashimoto, Kazuhiro Honsho, Mitsukazu Takahashi | 2017-02-21 |
| 9449861 | Substrate processing apparatus | Toyohide Hayashi, Koji Hashimoto | 2016-09-20 |