Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342162 | Resist removing method and resist removing apparatus | Masaki Inaba | 2022-05-24 |
| 11036142 | Substrate processing method and substrate processing device | — | 2021-06-15 |
| 10748795 | Substrate processing method and substrate processing apparatus | Toyohide Hayashi, Akito Hatano, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |
| 10639665 | Substrate processing apparatus and standby method for ejection head | Hiroyuki Yashiki, Masanobu Sato | 2020-05-05 |
| 10049900 | Substrate treatment method | Takayoshi Tanaka, Masanobu Sato | 2018-08-14 |
| 9768040 | Substrate treatment method | Takayoshi Tanaka, Masanobu Sato | 2017-09-19 |