Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11610790 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Motoyuki Shimai | 2023-03-21 |
| 11410863 | Substrate processing device including heater between substrate and spin base | Motoyuki Shimai, Akito Hatano | 2022-08-09 |
| 11075095 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Motoyuki Shimai | 2021-07-27 |
| 10748795 | Substrate processing method and substrate processing apparatus | Kota SOTOKU, Akito Hatano, Takayuki Gohara, Hiroaki Takahashi | 2020-08-18 |
| 10727090 | Substrate processing apparatus and substrate processing method | Noriyuki KIKUMOTO, Naoto Fujita, Michinori IWAO, Wataru Sakai | 2020-07-28 |
| 10593587 | Substrate treatment apparatus | Hiroshi Abe, Kenji Kobayashi | 2020-03-17 |
| 10332761 | Substrate processing apparatus | Kenji Kobayashi, Jun SAWASHIMA, Yuta Nishimura, Akito Hatano, Motoyuki Shimai | 2019-06-25 |
| 10297476 | Substrate processing apparatus | Jun SAWASHIMA, Akito Hatano, Kenji Kobayashi, Yuta Nishimura, Motoyuki Shimai | 2019-05-21 |
| 10032654 | Substrate treatment apparatus | Sei NEGORO, Ryo MURAMOTO, Koji Hashimoto, Yasuhiko Nagai | 2018-07-24 |
| 9810532 | Substrate treating apparatus and substrate treating methods | Koji Hashimoto, Akito Hatano, Keiichi Tsuchiya | 2017-11-07 |
| 9607844 | Substrate processing method and substrate processing apparatus | Jiro Okuda, Naohiko YOSHIHARA | 2017-03-28 |
| 9449861 | Substrate processing apparatus | Akito Hatano, Koji Hashimoto | 2016-09-20 |
| 9437464 | Substrate treating method for treating substrates with treating liquids | — | 2016-09-06 |
| 8877076 | Substrate treatment apparatus and substrate treatment method | Sei NEGORO, Ryo MURAMOTO, Koji Hashimoto, Yasuhiko Nagai | 2014-11-04 |
| 8652268 | Substrate treating method for treating substrates with treating liquids | — | 2014-02-18 |
| 8608864 | Substrate treating method | Masahiro Kimura, Hiroaki Takahashi, Tadashi MAEGAWA | 2013-12-17 |
| 8038799 | Substrate processing apparatus and substrate processing method | Tatsuo Nagai, Hiroshi Morita, Hiroaki Takahashi, Hiroaki Uchida | 2011-10-18 |
| 7785421 | Substrate treatment method and substrate treatment apparatus | — | 2010-08-31 |
| 6403924 | Apparatus for and method of heat treatment and substrate processing apparatus | — | 2002-06-11 |
| 6053058 | Atmosphere concentration monitoring for substrate processing apparatus and life determination for atmosphere processing unit of substrate processing apparatus | Hiroaki Sugimoto, Masaya Asai, Noriaki Yokono | 2000-04-25 |
| 5762684 | Treating liquid supplying method and apparatus | Masaki Iwami | 1998-06-09 |