Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676834 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Tsutomu OSUKA, Katsuei HIGASHI, Hiroshi Abe | 2023-06-13 |
| 11465167 | Substrate treatment apparatus | Hiroshi Abe, Manabu OKUTANI, Takashi Ota | 2022-10-11 |
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Yasunori Kanematsu, Manabu OKUTANI, Kenji AMAHISA +1 more | 2021-10-19 |
| 11139180 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Manabu OKUTANI | 2021-10-05 |
| 10964526 | Substrate processing method | Manabu OKUTANI, Kenji Kobayashi | 2021-03-30 |
| 10921057 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Noriyuki KIKUMOTO, Hiroshi Abe | 2021-02-16 |
| 10825713 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Manabu OKUTANI | 2020-11-03 |
| 10760852 | Substrate drying method and substrate processing apparatus | Manabu OKUTANI, Noriyuki KIKUMOTO, Hiroshi Abe | 2020-09-01 |
| 10695792 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Takashi Ota, Hiroshi Abe | 2020-06-30 |
| 10527348 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Takashi Ota, Hiroshi Abe | 2020-01-07 |
| 10475670 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Manabu OKUTANI | 2019-11-12 |
| 10249487 | Substrate processing method | Manabu OKUTANI, Kenji Kobayashi | 2019-04-02 |
| 9728443 | Substrate processing apparatus and substrate processing method | Kenji Kobayashi, Manabu OKUTANI | 2017-08-08 |
| 9607844 | Substrate processing method and substrate processing apparatus | Jiro Okuda, Toyohide Hayashi | 2017-03-28 |