Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11901173 | Substrate processing method | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2024-02-13 |
| 11469117 | Substrate processing apparatus, and substrate processing method | Hitoshi Nakai, Manabu OKUTANI | 2022-10-11 |
| 11404292 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Hiroshi Abe, Shuichi Yasuda, Hitoshi Nakai | 2022-08-02 |
| 11260431 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2022-03-01 |
| 11211241 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Naohiko YOSHIHARA, Manabu OKUTANI, Kenji AMAHISA +1 more | 2021-10-19 |
| 11101147 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Chikara MAEDA +2 more | 2021-08-24 |
| 10792712 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA, Manabu OKUTANI, Shuichi Yasuda, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10766054 | Substrate processing method and substrate processing apparatus | — | 2020-09-08 |
| 10651058 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai | 2020-05-12 |