Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Tsutomu OSUKA, Naohiko YOSHIHARA, Yasunori Kanematsu, Manabu OKUTANI +1 more | 2021-10-19 |
| 10276407 | Substrate processing apparatus and substrate processing method | Takeshi Yoshida, Toshimitsu NAMBA | 2019-04-30 |