Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11676834 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Katsuei HIGASHI, Hiroshi Abe, Naohiko YOSHIHARA | 2023-06-13 |
| 11152204 | Substrate processing method and substrate processing apparatus | Hitoshi Nakai, Naohiko YOSHIHARA, Yasunori Kanematsu, Manabu OKUTANI, Kenji AMAHISA +1 more | 2021-10-19 |
| 9403187 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Ryo MURAMOTO, Yasuhiko Nagai, Keiji Iwata | 2016-08-02 |
| 9340761 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Ryo MURAMOTO, Yasuhiko Nagai, Keiji Iwata | 2016-05-17 |