Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12255061 | Substrate processing method | Tetsuya EMOTO, Shigeru Yamamoto, Daiki Fujii, Kenji Edamitsu, Yuya KAWAI +1 more | 2025-03-18 |
| 12211687 | Substrate treatment apparatus and substrate treatment method | Shigeru Yamamoto, Daiki Fujii, Kenji Edamitsu, Yuya KAWAI, Kenichi Ito | 2025-01-28 |
| 10464107 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Tomohiro UEMURA, Yuji Sugahara | 2019-11-05 |
| 10290511 | Substrate treatment apparatus and substrate treatment method | Hiroki Tsujikawa, Shotaro Tsuda, Seiji ANO | 2019-05-14 |
| 9865994 | Vertical cavity surface emitting laser array and method for manufacturing the same | Ippei Matsubara, Takayuki Kona | 2018-01-09 |
| 9698568 | Vertical-cavity surface-emitting laser device and vertical-cavity surface-emitting laser array device | Ippei Matsubara, Takayuki Kona, Hiroshi Watanabe, Masashi Yanagase | 2017-07-04 |
| 9692211 | Vertical cavity surface emitting laser array | Ippei Matsubara, Takayuki Kona | 2017-06-27 |
| 9555452 | Substrate treatment method and substrate treatment apparatus | Sei NEGORO, Yasuhiko Nagai | 2017-01-31 |
| 9403187 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Ryo MURAMOTO, Yasuhiko Nagai, Tsutomu OSUKA | 2016-08-02 |
| 9340761 | Substrate processing method and substrate processing apparatus | Sei NEGORO, Ryo MURAMOTO, Yasuhiko Nagai, Tsutomu OSUKA | 2016-05-17 |
| 9118167 | Vertical cavity surface emitting laser | Hiroshi Watanabe, Atsushi TATE, Takayuki Kona, Ippei Matsubara | 2015-08-25 |
| 8734658 | Method for manufacturing grain-oriented electrical steel sheet | Yasuhiro Kikuchi | 2014-05-27 |
| 8519309 | Wafer heating apparatus and semiconductor manufacturing apparatus | Koichi Nagasaki, Tsunehiko Nakamura | 2013-08-27 |
| 8071916 | Wafer heating apparatus and semiconductor manufacturing apparatus | Koichi Nagasaki, Tsunehiko Nakamura | 2011-12-06 |
| 8034196 | Low core loss grain-oriented electrical steel plate and method of manufacturing the same | Hideyuki Hamamura | 2011-10-11 |
| 6605412 | Resist pattern and method for forming wiring pattern | Toshio Hagi | 2003-08-12 |
| 6205659 | Method for forming push rod for switch | — | 2001-03-27 |
| 5762183 | Switch device and manufacturing method of stationary contact base thereof | — | 1998-06-09 |
| 5679937 | Switching device | — | 1997-10-21 |
| 5680302 | AC output control apparatus | Michihisa Murasato, Kenichi TANIGAWA, Sadaharu Tamoto | 1997-10-21 |
| 5621649 | Method for analyzing electromagnetic field | Hosei Hirano, Takatsugu Ueyama, Kenji Umetsu | 1997-04-15 |