Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8956459 | Joined assembly, wafer holding assembly, attaching structure thereof and method for processing wafer | Tatsuya Maehara | 2015-02-17 |
| 8519309 | Wafer heating apparatus and semiconductor manufacturing apparatus | Keiji Iwata, Koichi Nagasaki | 2013-08-27 |
| 8071916 | Wafer heating apparatus and semiconductor manufacturing apparatus | Keiji Iwata, Koichi Nagasaki | 2011-12-06 |
| 7646580 | Electrostatic chuck and wafer holding member and wafer treatment method | Yasushi Migita | 2010-01-12 |
| 7457098 | Electrostatic chuck | — | 2008-11-25 |
| 7417206 | Heater, wafer heating apparatus and method for manufacturing heater | — | 2008-08-26 |
| 7361865 | Heater for heating a wafer and method for fabricating the same | Seiichirou Maki, Hiroshi Takenouchi, Hiroyuki Masuyama | 2008-04-22 |
| 7248456 | Electrostatic chuck | — | 2007-07-24 |
| 6914222 | Wafer heating apparatus | — | 2005-07-05 |
| 5648303 | Non-magnetic ceramics for recording/reproducing heads and method of producing the same | — | 1997-07-15 |