Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8503155 | Wafer support member, method for manufacturing the same and electrostatic chuck using the same | — | 2013-08-06 |
| 7651571 | Susceptor | — | 2010-01-26 |
| 7646580 | Electrostatic chuck and wafer holding member and wafer treatment method | Tsunehiko Nakamura | 2010-01-12 |
| 7068489 | Electrostatic chuck for holding wafer | — | 2006-06-27 |
| 6643115 | Electrostatic chuck | Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Junji Ohe, Masaki Terazono +2 more | 2003-11-04 |