Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643115 | Electrostatic chuck | Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Masaki Terazono, Yasushi Migita +2 more | 2003-11-04 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6643115 | Electrostatic chuck | Katsushi Sakaue, Shoji Kosaka, Ichio Kiyofuji, Masaki Terazono, Yasushi Migita +2 more | 2003-11-04 |