Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7361865 | Heater for heating a wafer and method for fabricating the same | Hiroshi Takenouchi, Hiroyuki Masuyama, Tsunehiko Nakamura | 2008-04-22 |
SM
Seiichirou Maki
Overall (All Time): #3,354,009 of 4,157,543Top 85%
1
Patents All Time