Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11064598 | Static eliminator and static eliminating method | Takayoshi Tanaka | 2021-07-13 |
| 10854479 | Substrate processing method and substrate processing device | Nobuyuki Shibayama, Masayuki Hayashi, Toru Edo | 2020-12-01 |
| 10290511 | Substrate treatment apparatus and substrate treatment method | Keiji Iwata, Hiroki Tsujikawa, Shotaro Tsuda | 2019-05-14 |
| 9805938 | Substrate processing apparatus and substrate processing method | Naozumi Fujiwara, Toru Edo, Yuji Sugahara, Jun SAWASHIMA | 2017-10-31 |