Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11881419 | Substrate processing apparatus | Toru Endo, Masayuki Hayashi | 2024-01-23 |
| 11764055 | Substrate processing method and substrate processing device | Toru Edo, Hiromichi KABA | 2023-09-19 |
| 11710629 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA | 2023-07-25 |
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2022-05-24 |
| 11217452 | Substrate processing device and substrate processing method for carrying out chemical treatment for substrate | Kenji IZUMOTO | 2022-01-04 |
| 11094529 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA | 2021-08-17 |
| 11052432 | Substrate processing method and substrate processing apparatus | Masayuki Hayashi, Toru Endo | 2021-07-06 |
| 11018034 | Substrate processing method and substrate processing apparatus | Toru Endo, Masayuki Hayashi | 2021-05-25 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Hideji NAOHARA, Hiroaki KAKUMA, Yuji Okita +1 more | 2021-05-18 |
| 10978317 | Substrate processing method and substrate processing apparatus | Toru Endo, Masayuki Hayashi | 2021-04-13 |
| 10854479 | Substrate processing method and substrate processing device | Masayuki Hayashi, Seiji ANO, Toru Edo | 2020-12-01 |
| 10720333 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2020-07-21 |
| 10672627 | Substrate processing method and substrate processing apparatus | Taiki HINODE, Sadamu Fujii | 2020-06-02 |
| 10199231 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2019-02-05 |
| 10058900 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Yukifumi YOSHIDA | 2018-08-28 |
| 10002770 | Substrate processing device and substrate processing method for carrying out chemical treatment for substrate | Kenji IZUMOTO | 2018-06-19 |
| 9786527 | Substrate processing device and substrate processing method for carrying out chemical treatment for substrate | — | 2017-10-10 |
| 7237562 | Substrate processing apparatus and control method of inert gas concentration | — | 2007-07-03 |