Issued Patents All Time
Showing 1–18 of 18 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12322600 | Substrate treatment apparatus, substrate treatment method, substrate treatment system, and learning data generation method | Takashi Ota, Takashi Ikeuchi, Yasunori Nakamura | 2025-06-03 |
| 12278083 | Substrate holder state detection device and substrate holder state detection method | Yuji Okita, Hiroaki KAKUMA, Tatsuya MASUI, Yuichi DEBA | 2025-04-15 |
| 12271448 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Tomonori Fujiwara, Yumiko Hirato, Atsushi Sonoda | 2025-04-08 |
| 12211197 | Substrate processing apparatus and substrate processing method | Hiroaki KAKUMA | 2025-01-28 |
| 12008022 | Data processing method, data processing device, and storage medium | Takashi Ikeuchi | 2024-06-11 |
| 11908752 | Substrate processing apparatus and substrate processing method | Yuji Okita, Hiroaki KAKUMA, Tatsuya MASUI | 2024-02-20 |
| 11829451 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Tomonori Fujiwara, Yumiko Hirato, Atsushi Sonoda | 2023-11-28 |
| 11646212 | Substrate treatment device | Yuji Okita, Hiroaki KAKUMA, Tatsuya MASUI | 2023-05-09 |
| 11474150 | Data processing method, data processing device, and non-transitory computer-readable recording medium | Mayumi Yamamoto | 2022-10-18 |
| 11322415 | Substrate treatment method and substrate treatment device | Yuji Okita, Hiroaki KAKUMA, Tatsuya MASUI | 2022-05-03 |
| 11294537 | Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program | Yumiko Hirato | 2022-04-05 |
| 11274995 | Data processing method, data processing device, and computer-readable recording medium having recorded thereon data processing program | Masashi Akita | 2022-03-15 |
| 11243862 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Tomonori Fujiwara, Yumiko Hirato, Atsushi Sonoda | 2022-02-08 |
| 11099105 | Data processing method, data processing device, and non-transitory computer-readable recording medium having recorded thereon data processing program | Mayumi Yamamoto | 2021-08-24 |
| 11054801 | Data processing method, data processing apparatus, data processing system, and recording medium having recorded therein data processing program | Takashi Ikeuchi | 2021-07-06 |
| 11011398 | Fume determination method, substrate processing method, and substrate processing equipment | Toru Endo, Masayuki Hayashi, Nobuyuki Shibayama, Hiroaki KAKUMA, Yuji Okita +1 more | 2021-05-18 |
| 10985038 | Determination method and substrate processing equipment | Hiroaki KAKUMA, Yuji Okita, Tatsuya MASUI | 2021-04-20 |
| 10651064 | Substrate treatment device and substrate treatment method | Hiroaki KAKUMA, Yuji Okita, Tatsuya MASUI | 2020-05-12 |