Issued Patents All Time
Showing 1–15 of 15 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12271448 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Hideji NAOHARA, Yumiko Hirato, Atsushi Sonoda | 2025-04-08 |
| 11829451 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Hideji NAOHARA, Yumiko Hirato, Atsushi Sonoda | 2023-11-28 |
| 11710629 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA | 2023-07-25 |
| 11342190 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2022-05-24 |
| 11243862 | Data processing method, data processing apparatus, and recording medium with data processing program recorded thereon | Hideji NAOHARA, Yumiko Hirato, Atsushi Sonoda | 2022-02-08 |
| 11094529 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA | 2021-08-17 |
| 10720333 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2020-07-21 |
| 10199231 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata, Akiyoshi Nakano | 2019-02-05 |
| 10058900 | Substrate processing apparatus and substrate processing method | Nobuyuki Shibayama, Yukifumi YOSHIDA | 2018-08-28 |
| 8021987 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2011-09-20 |
| 7655574 | Method of modifying insulating film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2010-02-02 |
| 7622402 | Method for forming underlying insulation film | Takuya Sugawara, Yoshihide Tada, Genji Nakamura, Shigenori Ozaki, Toshio Nakanishi +4 more | 2009-11-24 |
| 7368384 | Film formation apparatus and method of using the same | Atsushi Endo, Yuichiro Morozumi, Katsushige Harada, Shigeru Nakajima, Dong-Kyun Choi +2 more | 2008-05-06 |
| 7084023 | Method of manufacturing semiconductor device, film-forming apparatus, and storage medium | Shigeru Nakajima, Dong-Kyun Choi, Hiroaki Ikegawa, Genji Nakamura | 2006-08-01 |
| 7041546 | Film forming method for depositing a plurality of high-k dielectric films | Yuichiro Morozumi, Kazuhide Hasebe, Shigeru Nakajima, Haruhiko Furuya, Dong-Kyun Choi +3 more | 2006-05-09 |