Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata | 2022-05-24 |
| 10720333 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata | 2020-07-21 |
| 10424496 | Substrate treating method | Masafumi Inoue, Kurumi Yagi | 2019-09-24 |
| 10410887 | Substrate processing apparatus and substrate processing method | — | 2019-09-10 |
| 10199231 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Yukifumi YOSHIDA, Tetsuya Shibata | 2019-02-05 |
| 9343287 | Substrate processing apparatus including spin chuck | Kurumi Yagi | 2016-05-17 |
| 8051522 | Substrate treatment apparatus | Koichi Mukaegaki, Yoshikazu Kago, Hiroyuki Ueno | 2011-11-08 |
| 8020240 | Substrate treatment apparatus | Nobuyasu Hiraoka, Tsuyoshi Okumura | 2011-09-20 |
| 7979942 | Substrate treatment apparatus and substrate treatment method | Nobuyasu Hiraoka, Tsuyoshi Okumura, Hajime Ugajin | 2011-07-19 |
| 7437585 | Storage system and power control method therefor, adapter and power control method therefor, and storage controller and control method therefor | Kiyoshi Honda | 2008-10-14 |
| 4747952 | Method and apparatus for plasma treatment | Yoshimichi Harada, Yasuzo Kirita, Tadashi Miyahara, Yoshio Yagiri, Michiko Ueda +1 more | 1988-05-31 |
| 4721564 | Apparatus for the filtration of plasma from blood | Yoshimichi Harada, Takuichiro Watanabe | 1988-01-26 |
| 4650457 | Apparatus for extracorporeal lung assist | Tohru Morioka, Hidenori Terasaki, Hiroyuki Akasu, Kohichi Takase | 1987-03-17 |