Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8968475 | Substrate processing apparatus | Masaya Odagiri, Shigeki Tozawa | 2015-03-03 |
| 8956546 | Substrate processing method and substrate processing apparatus | Shigeki Tozawa | 2015-02-17 |
| 8440568 | Substrate etching method and system | — | 2013-05-14 |
| 7979942 | Substrate treatment apparatus and substrate treatment method | Nobuyasu Hiraoka, Tsuyoshi Okumura, Akiyoshi Nakano | 2011-07-19 |
| 7252778 | Etching method and etching device | Hayato Iwamoto, Kei Kinoshita | 2007-08-07 |