Issued Patents All Time
Showing 1–22 of 22 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12403500 | Substrate processing with polymer-containing liquid | Yu YAMAGUCHI, Song Zhang | 2025-09-02 |
| 12269068 | Substrate processing method and substrate processing device | — | 2025-04-08 |
| 11919051 | Substrate cleaning apparatus and substrate cleaning method | Ayumi HIGUCHI, Naoko Yamaguchi | 2024-03-05 |
| 11921426 | Substrate processing method, substrate processing apparatus, and recipe selection method | Katsuya Akiyama, Song Zhang | 2024-03-05 |
| 11901173 | Substrate processing method | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2024-02-13 |
| 11872605 | Substrate processing method and substrate processing apparatus | Katsuya Akiyama | 2024-01-16 |
| 11710629 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama | 2023-07-25 |
| 11543752 | Substrate processing method, substrate processing apparatus, and recipe selection method | Katsuya Akiyama, Song Zhang | 2023-01-03 |
| 11517941 | Substrate processing method and substrate processing apparatus | Katsuya Akiyama | 2022-12-06 |
| 11501984 | Substrate processing device and substrate processing method | — | 2022-11-15 |
| 11413662 | Substrate cleaning apparatus and substrate cleaning method | Ayumi HIGUCHI, Naoko Yamaguchi | 2022-08-16 |
| 11404292 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Hiroshi Abe, Shuichi Yasuda, Yasunori Kanematsu, Hitoshi Nakai | 2022-08-02 |
| 11342190 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Tetsuya Shibata, Akiyoshi Nakano | 2022-05-24 |
| 11260431 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2022-03-01 |
| 11211241 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2021-12-28 |
| 11101147 | Substrate processing method and substrate processing apparatus | Hiroaki Takahashi, Masayuki OTSUJI, Manabu OKUTANI, Chikara MAEDA, Hiroshi Abe +2 more | 2021-08-24 |
| 11094529 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama | 2021-08-17 |
| 11020776 | Substrate cleaning method and substrate cleaning apparatus | — | 2021-06-01 |
| 10792712 | Substrate processing method and substrate processing apparatus | Manabu OKUTANI, Shuichi Yasuda, Yasunori Kanematsu, Dai Ueda, Song Zhang +2 more | 2020-10-06 |
| 10720333 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Tetsuya Shibata, Akiyoshi Nakano | 2020-07-21 |
| 10199231 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama, Tetsuya Shibata, Akiyoshi Nakano | 2019-02-05 |
| 10058900 | Substrate processing apparatus and substrate processing method | Tomonori Fujiwara, Nobuyuki Shibayama | 2018-08-28 |