Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11921426 | Substrate processing method, substrate processing apparatus, and recipe selection method | Yukifumi YOSHIDA, Song Zhang | 2024-03-05 |
| 11872605 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA | 2024-01-16 |
| 11543752 | Substrate processing method, substrate processing apparatus, and recipe selection method | Yukifumi YOSHIDA, Song Zhang | 2023-01-03 |
| 11517941 | Substrate processing method and substrate processing apparatus | Yukifumi YOSHIDA | 2022-12-06 |
| 11331625 | Gas treatment method and gas treatment apparatus | Akira Kishimoto, Hiroshi Machida, Tsuyoshi Yamaguchi, Takehiro Esaki, Koyo Norinaga | 2022-05-17 |
| 10576412 | Gas treatment method and gas treatment device | Akira Kishimoto, Akira Matsuoka, Makoto Nishimura, Hiroshi Machida, Tsuyoshi Yamaguchi +2 more | 2020-03-03 |
| 9157633 | Method for suppressing adhesion of ash and device for suppressing adhesion of ash in boiler | Haeyang Pak | 2015-10-13 |
| 9138680 | Method for removing nitrogen oxides | Takeshi Yamashita, Noriaki Mizutani | 2015-09-22 |
| 6086361 | Melt treatment apparatus | Yasuo Higashi, Tsuyoshi Noura, Akiyoshi Yamane | 2000-07-11 |