Issued Patents All Time
Showing 1–25 of 25 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11919051 | Substrate cleaning apparatus and substrate cleaning method | Yukifumi YOSHIDA, Naoko Yamaguchi | 2024-03-05 |
| 11881403 | Substrate processing method and substrate processing apparatus | Yuya AKANISHI | 2024-01-23 |
| 11413662 | Substrate cleaning apparatus and substrate cleaning method | Yukifumi YOSHIDA, Naoko Yamaguchi | 2022-08-16 |
| 11410853 | Substrate processing method and substrate processing device | Yuya AKANISHI | 2022-08-09 |
| 11260436 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Shota IWAHATA | 2022-03-01 |
| 11217461 | Substrate processing device | — | 2022-01-04 |
| 11145516 | Substrate processing method and substrate processing apparatus | Yuya AKANISHI | 2021-10-12 |
| 11094564 | Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying method | Shota IWAHATA, Eri Fujita, Yoshiyuki FUJITANI, Masako Mano, Yusuke TAKEMATSU +1 more | 2021-08-17 |
| 11018017 | Substrate treatment method | Akihisa IWASAKI | 2021-05-25 |
| 10840083 | Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipe | Kana Komori | 2020-11-17 |
| 10816141 | Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrate | Eri Fujita, Shota IWAHATA, Masayuki OTSUJI, Yoshiyuki FUJITANI | 2020-10-27 |
| 10717117 | Substrate processing apparatus and substrate processing method | Naoyuki Osada, Takahiro Yamaguchi, Eri Fujita, Akihisa IWASAKI, Shota IWAHATA | 2020-07-21 |
| 10710913 | Waste liquid treatment method and waste liquid treatment apparatus | — | 2020-07-14 |
| 10651029 | Substrate processing apparatus and substrate processing method | Hiroaki Takahashi, Kazunori Fujikawa, Tomonori Kojimaru, Tomomasa ISHIDA, Naozumi Fujiwara +2 more | 2020-05-12 |
| 10622204 | Substrate processing apparatus and substrate processing method | Akihisa IWASAKI | 2020-04-14 |
| 10312114 | Substrate processing method, and substrate processing device | Asuka YOSHIZUMI | 2019-06-04 |
| 9984903 | Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatus | Asuka Wakita | 2018-05-29 |
| 9768042 | Substrate processing method and substrate processing apparatus | Asuka Wakita | 2017-09-19 |
| 9548197 | Substrate treatment method and substrate treatment apparatus | Asuka YOSHIZUMI | 2017-01-17 |
| 9508568 | Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate | Asuka YOSHIZUMI | 2016-11-29 |
| 9230836 | Substrate treatment method | Yoshiyuki FUJITANI, Takemitsu MIURA, Rei TAKEAKI | 2016-01-05 |
| 8888925 | Nozzle, substrate processing apparatus, and substrate processing method | Masanobu Sato, Hiroyuki Yashiki, Mai YAMAKAWA, Takayoshi Tanaka, Rei TAKEAKI | 2014-11-18 |
| 7981286 | Substrate processing apparatus and method of removing particles | Kenichiro Arai | 2011-07-19 |
| 7841788 | Substrate processing apparatus and substrate processing method | Kenichiro Arai | 2010-11-30 |
| 7392814 | Substrate processing apparatus and method | Koji Hasegawa, Masato Tanaka, Kenichiro Arai | 2008-07-01 |