Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10312114 | Substrate processing method, and substrate processing device | Ayumi HIGUCHI | 2019-06-04 |
| 9548197 | Substrate treatment method and substrate treatment apparatus | Ayumi HIGUCHI | 2017-01-17 |
| 9508568 | Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrate | Ayumi HIGUCHI | 2016-11-29 |
| 9362147 | Substrate treatment method | Takashi Izuta, Hiroaki Ishii | 2016-06-07 |
| 8361234 | Substrate treatment apparatus | Takashi Izuta, Hiroaki Ishii | 2013-01-29 |