Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12337289 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto, Kazuhiro Fujita +4 more | 2025-06-24 |
| 12064739 | Chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto, Kazuhiro Fujita +4 more | 2024-08-20 |
| 11439967 | Chemical liquid preparation method, chemical liquid preparation device, and substrate processing device | Hajime NISHIDE, Takatoshi Hayashi, Katsuhiro Fukui, Koichi Okamoto, Kazuhiro Fujita +4 more | 2022-09-13 |
| 9362147 | Substrate treatment method | Hiroaki Ishii, Asuka YOSHIZUMI | 2016-06-07 |
| 8361234 | Substrate treatment apparatus | Hiroaki Ishii, Asuka YOSHIZUMI | 2013-01-29 |
| 8153017 | Substrate treating method | — | 2012-04-10 |